Unique Features for Enhanced Performance
The flexible XGT micro-XRF system covers everything from macro
analysis, for a general survey of a wide area, to the inspection
of a specific micro area, with simultaneous XRF and transmission
imaging. Their many features ensure high performance analysis with
easy operation.

The unique x-ray guide tube technology of HORIBA provides
the highest spatial resolution micro-XRF analysis, with
x-ray beam diameters down to 10 µm. The high intensity,
ultra-narrow beams provided by the guide tubes allow fast,
non-destructive analysis of microscopic features.
The
XGT systems can obtain transmitted X-ray images, so
it can be used to perform internal structural analyses
and identify regions of interest not visible to the
eye. Scanning is done with a narrow perpendicular beam,
resulting in clear penetrating images even for non-flat
samples such as cylindrical parts.
A
localized vacuum within the analysis head increases
sensitivity to light elements, and removes the need
for the whole sample chamber to be held at vacuum.
As a result, samples can be measured at normal atmospheric
pressure, and the need for preprocessing procedures
such as sample drying has been eliminated.
The
accommodating sample chamber enables a wide range of
samples to be analyzed, from a 10 µm spot analysis
on a microscopic feature, to mapped analysis of areas
as large as 10cm x 10cm. Options for extended sample
chambers allow further flexibility with larger samples.
Considered design is combined with intuitive software
to ensure fast and easy operation. Sample positioning is
fully automated, so that in just three easy clicks, you
can go from a view of the entire sample to specifying the
10 µm point to be measured.
Intuitive software allows easy control
of instrument hardware, fast sample visualization and selection
of measurement
region, and full data analysis. Functions include automated
peak identification, quantitative measurements, RGB composite
image generation, line profile analysis, inter-image arithmetic
and phase analysis.