VUV Spherical Mirrors
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Information
Specifications and Control
Ultimate Specification |
Standard Specification |
Control |
|
| Dimension | Up
to 250 mm length |
||
Radius
of Curvature |
Down
to 0.01% |
0.5% |
Calibrated
Samples LTP measurement |
| Slope error | Down
to 0.1 arcsec rms |
0.2
arcsec rms |
LTP
measurement Interferometer |
| Microroughness | Down
to 2 Å rms |
5 Å rms |
Micromap
measurements |
| Substrate | Silicon Zerodur Fused Silica SiC CVD |
||
| Coating | Au Pt AlMgF Ni |
Cr
binding layer |
Quartz
monitoring |
Examples of Typical Spherical Mirrors
| Size mm |
Optical surface mm |
Radiuses of Curvature |
Slope Error arcsec rms |
Max Microroughness Å rms |
Coating |
Substrate |
200x50x30 |
190x45490x50 |
JY
calibrated samples |
0.2
arcsec rms |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
100x30x20 |
95x25 |
JY
calibrated samples |
0.2
arcsec rms |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
75x15x15 |
70x10 |
JY
calibrated samples |
0.1
arcsec rms |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
