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Location: Products >> Gratings, OEM & VUV >> Vacuum UV >> Gratings >> Variable Line Space Spherical Grating
Variable Line Space Spherical Holographic Grating
Specifications and Control
 

Ultimate Specifications

Standard Specifications

Control

Dimension
Up to 250 mm length
Radius of Curvature
Down to 0.01%
0.5 %
Calibrated samples
LTP Measurements
Slope Error
Down to 0.1 arcsec rms
0.2 arcsec rms
LTP Measurements
Interferometer
Microroughness
Down to 2 Å rms
5 Å rms
Micromap measurements
Substrate
Silicon
Fused Silica
SiC CVD
Coating
Au
Pt
AlMgF
Ni
Cr binding layer
Quartz monitoring
Groove Density
Follows a polynomial law
Recording layout using JY proprietary software
Optical ray tracing of the monochromator
Moiré Fringes (JY patent)
LTP measurement
Efficiency
Groove depth and duty cycle ratio optimised with JY proprietary software
Groove Depth
+/- 5%
+/- 10%
AFM measurements
c/d Ratio
+/- 5%
+/- 10%
AFM measurements

Examples of Spherical Variable Line Space Plane Holographic Gratings

Size mm

Optical surface mm

Slope Error arcsec rms

Max Microroughness Å rms

Coating

Substrate

200x50x30
190x45
0.2 arcsec rms
5
Au or Pt
Silicon
Fused Silica
150x40x25
140x35
0.2 arcsec rms
5
Au or Pt
Silicon
Fused Silica
100x30x20
90x25
0.1 arcsec rms
5
Au or Pt
Silicon
Fused Silica

Note: Recording wavefronts are either two spherical, one spherical and one aspherical or both aspherical depending on the required polynomial.

 








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