VUV Cylindrical Mirrors
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Information
Specifications and Control
| Ultimate Specification |
Standard Specification |
Control |
|
| Dimension | Up
to 500 mm length |
||
Radius
of Curvature |
Down
to 0.01% |
0.5% |
Calibrated
Samples |
| Slope error | Down
to 0.5 arcsec rms longitudinal 1 arcsec rms transverse |
1
arcsec rms longitudinal 5 arcsec rms transverse |
Visual interferometric comparison to calibrated sample |
| Microroughness | Down
to 2 Å rms |
5 Å rms |
Micromap
measurements |
| Substrate | Silicon Zerodur Fused Silica SiC CVD |
||
| Coating | Au Pt AlMgF Ni |
Cr
binding layer |
Quartz
monitoring |
Examples of Typical Cylindrical Mirrors
| Size mm |
Optical surface mm |
Radiuses of Curvature |
Slope Error arcsec rms |
Max Microroughness Å rms |
Coating |
Substrate |
500x60x60 |
490x50 |
JY
calibrated samples |
1
arcsec rms longitudinal 5 arcsec rms transverse |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
300x50x40 |
292x42 |
JY
calibrated samples |
1
arcsec rms longitudinal 5 arcsec rms transverse |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
150x30x30 |
142x22 |
JY
calibrated samples |
1
arcsec rms longitudinal 1 arcsec rms transverse |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
75x15x15 |
70x10 |
JY
calibrated samples |
1
arcsec rms longitudinal 1 arcsec rms transverse |
5 |
Au
or Pt |
Silicon Zerodur Fused Silica |
