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Location: Products >> Gratings, OEM & VUV >> Vacuum UV >> Gratings >> Aberration Corrected Spherical Grating
Aberration Corrected Spherical Holographic Grating
Specifications and Control
 

Ultimate Specification

Standard Specification

Control

Dimension
Up to 250 mm length
Radius of Curvature
Down to 0.01%
0.5%
Calibrated Samples
LTP measurements
Slope Error
Down to 0.1 arcsec rms
0.2 arcsec rms
LTP measurements
Interferometer
Microroughness
Down t0 2 Å rms
5 Å rms
Micromap measurements
Substrate
Silicon
Fused Silica
SiC CVD
Coating
Au
Pt
AlMgF
Ni
Cr binding layer
Quartz monitoring
Groove Density
Optimised using JY proprietary software according to required optical layout
Moiré Fringes (JY Patent)
Optical control using recording layout (JY Patent)
Efficiency
Groove depth and duty cycle ratio optimised by JY proprietary software according to required optical layout
Groove Depth
+/- 5%
+/- 10
AFM measurements
c/d Ratio
+/- 5%
+/- 10
AFM measurements

Examples of Spherical Aberration Corrected Holographic Gratings

Size mm

Optical Surface mm

Slope Error arcsec rms

Microroughness Å rms

Coating

Substrate

200x50x30
190x45
0.2 arcsec rms
Less than 5
Au or Pt
Silicon
Fused Silica
150x30x30
140x20
0.2 arcsec rms
Less than 5
Au or Pt
Silicon
Fused Silica
75x15x150
70x10
0.1 arcsec rms
Less than 5
Au or Pt
Silicon
Fused Silica

Note: Groove density is obtained by interference of two spherical wavefronts.

 








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