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Location: Products >> Gratings, OEM & VUV >> Vacuum UV >> Gratings >> Aberration Corrected Grating
Aberration Corrected Plane Holographic Gratings
Specifications and Control
 

Ultimate Specifications

Standard Specifications

Control

Dimension
Up to 250 mm length
Radius of Curvature
Superior at few tens of km
LTP Measurements
Slope Error
Down to 0.1 arcsec rms
0.2 arcsec rms
LTP Measurements
Interferometer
Microroughness
Down to 2 Å rms
5 Å rms
Micromap measurements
Substrate
Silicon
Fused Silica
SiC CVD
Coating
Au
Pt
AlMgF
Ni
Cr binding layer
Quartz monitoring
Groove Density
Optimised with JY proprietary software
Moiré Fringes (JY patent)
Optical control using recording layout (JY patent)
Efficiency
Groove depth and duty cycle ratio optimised with JY proprietary software
Groove Depth
+/- 5%
+/- 10%
AFM measurements
c/d Ratio
+/- 5%
+/- 10%
AFM measurements

Examples of Aberration Corrected Plane Holographic Gratings

Size mm

Optical surface mm

Slope Error arcsec rms

Max Microroughness Å rms

Coating

Substrate

200x50x30
190x45
0.2 arcsec rms
5
Au or Pt
Silicon
Fused Silica
150x40x25
140x35
0.2 arcsec rms
5
Au or Pt
Silicon
Fused Silica
100x30x20
90x25
0.1 arcsec rms
5
Au or Pt
Silicon
Fused Silica

Note: Groove density is obtained by interference of two spherical wavefronts

 








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