Spectroscopic Ellipsometers
Unique technologies providing
the most sensitive, accurate measurement along with advanced
thin film characterization capabilities.
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In-Situ Ellipsometers
High precision, high speed monitoring and control of thin
film deposition or etch processes.
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Fully Automated Ellipsometers
Designed for the semiconductor industry allowing reliable
in-line process control and high yield production.
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Large Area Metrology Systems
Designed for the display industry, capable to handle up
to 7th generation display substrates.
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Software
DeltaPsi2 is a new generation of software based on a common
GUI frame, and has been designed to provide intuitive and
comprehensive user interaction with the system. The multitasking
software provides the ultimate in versatility for use in
ex-situ and in-situ configurations as well as the ability
to drive fully automatic ellipsometers.
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