In-Situ / In-Line Ellipsometers

In situ spectroscopic ellipsometer allows the real-time monitoring and control of thin film deposition and etch processes with sub-monolayer resolution. It provides real-time calculation of film thickness, optical constants, composition of thin film stacks in different ambient.

MM-16

MM-16
VIS Spectroscopic Ellipsometer

UVISEL In Line

UVISEL In-Line
In Line Spectroscopic Ellipsometer

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