Monitoring of Thin Film Processes
Jobin
Yvon is proud to introduce the 2nd generation of the DIGISEL:
the high precision, high-speed laser ellipsometer
specifically designed for real-time, in-situ monitoring
and control of thin film deposition or etch processes.
The new generation of DIGISEL delivers superior performance and features a highly flexible Windows® based software package. The advanced design of the software provides an efficient solution for demanding research and industrial quality control applications. It includes convenient routines for daily work as well as the high standards of Advanced Process Control functionality required in a manufacturing environment.
Fast, accurate and reliable ellipsometric data is guaranteed, along with real-time calculations of the thickness and refractive index of single layer films in-situ. The DIGISEL is fully integrated, simple to operate and highly adaptable to many types of processes.
This new sensor can be used either as a standalone instrument or in combination with other Jobin Yvon metrology equipment to provide a comprehensive integrated process control solution customized to meet your application-specific requirements.
The in-situ laser ellipsometry technique is suitable for thickness monitoring, growth and etch rates, endpoint detection, surface damage and contamination.
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